Uwe aka Lijiejing nke dị sentimita 9 n'obosara: Ụkpụrụ ọhụrụ maka nchekwa dị ọcha maka mmepụta semiconductor

N'ihi ihe ndị siri ike a chọrọ n'ịmepụta semiconductor, uwe aka Lijie nke dị sentimita 9 nke nwere obere chlorine nitrile aghọwo ihe nchebe dị mkpa na nhazi wafer na nhazi chip n'ihi obere ihe fọdụrụ na ionic na arụmọrụ dị elu nke ịdị ọcha. Site na nhazi pụrụ iche, a na-achịkwa ọdịnaya chlorine nke uwe aka ahụ nke ọma na ≤50ppm - nke karịrị ọkọlọtọ ụlọ ọrụ nke 100ppm nke ukwuu. Nke a na-egbochi ihe egwu nchara nke mbugharị ion chloride na-akpata na elu wafer, na-emezu ihe siri ike nke mmepụta semiconductor maka njikwa mmetọ microscopic.

N'oge usoro lithography, ịdị ọcha uwe aka na-emetụta kpọmkwem nhacha mkpuchi photoresist na nsonaazụ ikpughe. Emepụtara ya na Class 100,000 ụlọ nhicha ma na-ewepụ uzuzu laser, ngwaahịa a na-egosipụta mmịpụta nke ihe dị n'elu ala n'okpuru 0.2 iberibe / square inch - na-emezu ụkpụrụ ụlọ nhicha ISO Class 3. Nke a na-egbochi nrapado obere akụkụ na elu wafer nke ọma, si otú a na-ebelata ntụpọ lithography. Nhazi ogologo inch 9 na-enye mkpuchi zuru oke site na nkwojiaka ruo n'ọbụ aka. Ejikọtara ya na nhazi cuff elastic, ọ na-eme ka ọrụ dịkwuo mfe ma na-egbochi mwụfu uzuzu na oghere aka uwe, na-emezu ihe achọrọ siri ike maka gburugburu ebe dị ọcha na usoro lithography.

N'oge usoro ndị metụtara ihe ndị na-emebi emebi dịka ịcha na itinye ion, uwe aka ndị a na-egosi ike kemịkalụ pụrụ iche. Mgbe anwalechara ihe ndị na-eme ka ihe ndị na-eme ka ihe dị n'ime ahụ ruo awa iri abụọ na anọ n'ime ihe ndị na-eme ka ihe dị n'ime semiconductor dị ka hydrofluoric acid na phosphoric acid, ha anaghị enwe ọzịza ma ọ bụ mgbawa, ebe ọnụego mgbanwe ibu dị n'okpuru 0.8%. Nke a na-enye nchebe aka a pụrụ ịdabere na ya maka ndị na-arụ ọrụ ebe ha na-ewepụ ihe egwu nke mmetọ reagent site na mmebi uwe aka. Mkpịsị aka nwere udidi mgbochi mmịpụ 0.02mm nke e ji laser dee, na-eme ka esemokwu dịkwuo elu site na 35% mgbe ha na-ejikwa wafers nke dị sentimita iri na abụọ ma na-ebelata ihe egwu nke mmịpụ wafer site na 60%. Nke a na-enweta nguzozi n'etiti nchekwa nchebe na nkwụsi ike ọrụ.

Ugbu a, a na-enye akara aka ndị a n'usoro mmepụta ihe dị iche iche na ụlọ ọrụ mmepụta ihe ndị a ma ama dịka SMIC na Hua Hong Semiconductor. Ha na-ebelata ọnụego mkpofu wafer nke aka na-akpata site na kọntaktị aka site na 38%, na-eme ka ha bụrụ nhọrọ kacha mma na mmepụta semiconductor maka ịhazi nchekwa ụlọ dị ọcha na arụmọrụ ọrụ.