Otu esi ahọrọ uwe aka kwesịrị ekwesị maka usoro Wafer Lithography?

N'imepụta wafer semiconductor, usoro lithography bụ usoro dị oke mkpa, nke a na-achịkwa nke ọma nke na-ekpebi mmepụta chip. Dịka "isi ihe ngosi na onyonyo" na usoro mmepụta wafer, lithography gụnyere usoro ọrụ niile - gụnyere mkpuchi spin, ikpughe, mmepe, ịchacha ihe, na nhicha mmiri - ma na-etinye ihe siri ike dị ukwuu na ịdị ọcha gburugburu ebe obibi, njikwa adịghị ọcha, nchebe electrostatic, na iguzogide kemịkalụ. Ihe ndị na-emebi uzuzu nke micron, mbugharị ion trace, na mwepụ electrostatic nwa oge nwere ike ibute ntụpọ photoresist ozugbo, nhazi ụkpụrụ, oxidation wafer, na sekit micro-short na sekit, na-eduga na mkpochapụ nke wafers dum ma na-ebute nnukwu mfu mmepụta. Ọtụtụ FAB na-agbasi mbọ ike imeziwanye mmepụta nke usoro photolithography ha. Ọbụna mgbe akụrụngwa, usoro, na paramita gburugburu ebe obibi niile dị n'usoro, ihe mgbochi na-adịkarị na ihe ndị yiri ka ọ dịghị mkpa maka nchekwa aka. Gwọọ ụlọ nhicha nkịtị nke klas 1,000 ma ọ bụ uwe aka ụlọ ọrụ anaghị adabara kpamkpam maka ụkpụrụ dị elu nke usoro photolithography.

Gịnị mere e ji machibido iji uwe aka ụlọ nhicha nkịtị eme ihe n'usoro akwụkwọ ọgụgụ?

Ihe fọdụrụ n'ime ntụ ntụ na-akpata mmetọ fotoresist

Ion sọlfọ na kọlọdi gabigara ókè na-emebi sekit ndị dị na wafers ahụ

Ọkụ eletrik na-anaghị agbanwe agbanwe enweghịzi ike ịchịkwa ya, nke mere ka ọ daa na wafer fotolithography ziri ezi

Ịgbaji na ịwụfu ihe, na-ebute ntụpọ ihe ndị si mba ọzọ na usoro mmepụta ihe

LjieClean Klas 100 Na-enweghị Ntụ ntụ Nitrile Gloves

Onye ndu Suzhou na-elekwasị anya na ngalaba mmepụta wafer semiconductor ma na-edozi isi ihe mgbu na usoro lithography, anyị emepụtala uwe aka pụrụ iche nke Klas 100 na-enweghị ntụ ntụ, nke na-anaghị egbu oge nke ọma nke na-emezu ihe achọrọ maka mmepụta nke usoro lithography wafer niile, na-eme ka ha bụrụ ihe nchekwa kachasị mma maka ọtụtụ ụlọ ọrụ na-emepụta akwa na nkwakọ ngwaahịa wafer na nnwale.

1. Usoro enweghị ntụ ntụ dabere na Dichloride: enweghị ntụ ntụ na Usoro Photolithography

Site na iji usoro nhicha chlorine nke semiconductor, usoro a achọghị ka etinye ihe mgbakwunye ndị ọzọ dịka talc, cornstarch, ma ọ bụ silicone n'oge usoro ahụ dum. Ọ na-eme ka e jiri ya nke ọma site na usoro ahụ n'onwe ya, na-ewepụ ntụ ntụ na ihe fọdụrụ na mmanụ silicone nke na-emerụ photoresist na isi iyi ahụ, si otú a na-edozi ntụpọ ndị si mba ọzọ na usoro photolithography kpamkpam.

2 Mmiri a na-asachapụ nke ọma nke nwere ọtụtụ ọkwa na-eme ka sọlfọ dị ala, klorine dị ala, na ion dị ala.

Site na ọtụtụ usoro nke ịsacha miri emi na mmiri dị ọcha nke ukwuu, a na-ewepụ ihe mgbakwunye ihe ndị e ji ihe mee na ihe fọdụrụ n'elu. A na-achịkwa ọdịnaya nke sọlfọ, chlorine, na ion ígwè na-agbaze nke ọma, na-ebute obere NVR (ihe fọdụrụ na-anaghị agbanwe agbanwe). Nke a na-egbochi oxidation wafer, corrosion mkpuchi, na ntụpọ etching, na-eme ka uwe aka dabara nke ọma na usoro lithography siri ike maka wafers 8- na 12-inch.

Nchedo ESD Atọ Agbanweri n'ime Mkpụ iji Chekwaa Wafers Ndị Na-adịghị Emetụta Electrostatic

N'adịghị ka uwe aka mgbochi-static dị n'ahịa nwere mkpuchi ịgba mmiri nwa oge, Gonars na-eji teknụzụ mgbanwe mgbochi-static n'ime ebu na ihe ntọala nitrile. Nke a na-eme ka iguzogide elu kwụsie ike ma dị otu, na-agbaze ọkụ eletrik na-agbanwe agbanwe n'oge niile iji gbochie nrụpụta static nke nwere ike ibute mmebi nke photoresist na mmebi na sekit wafer ziri ezi. Ọ dabara adaba maka usoro lithography isi dị ka ikpughe na mmepe.

4Mfe na Nkwụsi Ike, Dabara adaba maka Ọrụ Nkọcha Micron-Level

Ihe e ji aka mee na-agbanwe agbanwe ma kwekọọ na nhazi aka ahụ. Ọ nwere nhazi ederede na-anaghị amị amị n'aka, ọ dịkwa fechaa ma ghara ibu ibu, na-eme ka ọ dị mma maka ọrụ nkenke dịka ijikwa wafer photolithography, idozi ngwaọrụ, na inyocha nke ọma. Ọ na-enye mmegharị na-enweghị mmachi ma na-egbochi ịmịpụ, na-ebelata mmebi nke ihe mberede kpatara n'oge ọrụ aka. Na mgbakwunye, ọ na-eguzogide ihe mgbaze photolithography na acid dị nro na alkalis, ọ na-adịgidekwa ike na-enweghị ịka nká ma ọ bụ dọka ọbụna n'oge ojiji ogologo oge.

5

✅ Nkwakọ ngwaahịa nke nwere akwa abụọ nke e ji ihe mkpuchi ikuku kpuchie na-ewepụ mmetọ nke abụọ

A na-etinye ngwaahịa ndị emechara n'ime ụlọ nhicha Class 100 site na iji nkwakọ ngwaahịa nwere oghere abụọ nke na-ekpuchi ihe mkpofu, nke na-ekewapụ ha kpamkpam pụọ na uzuzu na mmiri mmiri n'oge nchekwa na njem. Enweghị mmetọ ọzọ mgbe emepere ngwugwu ahụ, nke na-enye ohere ka ejiri ha ozugbo na ụlọ nhicha Class 100 lithography.